| Size | Thickness | Material | Spec. Capability |
| 4" x 4" | 0.06" / 0.09" | Quartz / Soda lime | 0.5 ± 0.05um (Quartz) 2.0 ± 0.2um (Soda lime) |
| 5" x 5" | 0.09" | ||
| 6" x 6" | 0.09" / 0.12" | ||
| 7" x 7" | 0.12" | ||
| 9" x 9" | 0.12" | ||
| 14" x 14" | 0.12" / 4.8mm | ||
| 420 x 520mm ~ 1100 x1100mm |
4.8mm / 5.0mm / 7.8mm / 8.0mm |
Photomask
Aligner Mask
DETAIL