| Size | Thickness | Material | Spec. Capability |
| 4" x 4" | 0.06" / 0.09" | Soda lime | 2 ± 0.2um (Master) ± 0.25um (Copy) |
| 5" x 5" | 0.09" | ||
| 6" x 6" | 0.09" / 0.12" | ||
| 7" x 7" | 0.12" | ||
| 9" x 9" | 0.12" |
Photomask
Copy Mask
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